The Challenge
Our client, an esteemed electronic research institute, approached us with a complex challenge: treating a mixture of chlorine/halide gases (approximately 1-10% by volume) with krypton (90-99%) generated during their UV lamp experiments. This unique combination of gases required an advanced and reliable solution to ensure safe and efficient gas treatment.
The Solution: Dry Scrubbing Technology
After extensive research and analysis, we proposed the implementation of dry scrubbing technology—an advanced method widely used for gas abatement in processes like Advanced Chemical Vapor Deposition (CVD), PCF, PECVD, LPCVD, and MOCVD. Our team developed and tailored a point-of-use facility specifically designed for the client's needs, leveraging our expertise in waste gas treatment for global high-tech industries.
Dry scrubbers are particularly effective for handling a variety of gases, including condensable, flammable, corrosive, reactive, toxic, and/or pyrophoric gases such as silanes, silane organics, terpenoids, hydrogen, ammonia, or hydrogen halides. Additionally, they manage fine dust particles, ensuring comprehensive treatment of waste gases.
How It Works: Adsorption Technology
The dry scrubber operates on the principle of adsorption technology. The system is equipped with adsorption media that captures and controls pollutants by forcing the gas fumes across a bed of this media. This process effectively reduces the concentration of hazardous gases, making it an ideal solution for the client's requirements.
Key Features
Results
Upon complete installation, the dry scrubbing system successfully controlled the gas emissions to meet the client's stringent requirements. The system achieved an impressive efficiency rate of approximately 99%, demonstrating its effectiveness and reliability in treating complex gas mixtures.
